FACILITIES

Class 100 and Class 10000 Cleanrooms

Process lab:

1. Box Coater

2. Reactive Ion Etcher (RIE)

3. Rapid Thermal Annealer (RTP)

4. Plasma Enhanced Chemical Vapour Deposition Systems (PECVDs)

5. Surface Profiler (DEKTAK)

6. Ellipsometer

7. Ovens

Photolithography Lab:

1. Mask Aligner System

2. Scanning Electron Microscope (SEM)

3. Metallurgical Microscope

Characterization Lab:

1. Ultra High Vacuum System

2. Wire Bonder

3. Network Analiser

4. Excimer Laser

5. Probe Station

6. Monochrometer

Spectroscopy Lab:

1. Ar Laser

2. Monochrometer

3. Photomultiplier

4. Low Temparature Cryostat

5. Optical Wave Guide Testing Set-Up